Title |
In situ Untersuchung der laserinduzierten Abscheidung von amorphem, wasserstoffhaltigem Silizium durch FTIR-Transmissionsspektroskopie / [vorgelegt von Jürgen Knobloch] |
|---|---|
Involved |
Jürgen Knobloch (Verfasser) |
Published |
1997 |
Extent |
III, 125 S. : Ill., graph. Darst. |
Thesis |
Heidelberg, Univ., Diss., 1997 |
Language |
|
Topic |
|
Subject |
Silicium, Amorpher Halbleiter, Wasserstoff, Schichtwachstum, FT-IR-Spektroskopie, In situ |
Record ID |
949707244 |
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