Title |
Elektroaktive Passivierung von hochsperrenden pn-Übergängen in Silizium mit amorphen, wasserstoffhaltigen Kohlenstoffschichten (a - C:H) / vorgelegt von Reiner Barthelmess |
|---|---|
Involved |
Reiner Barthelmess (Verfasser) |
Published |
1995 |
Extent |
102, [10] S. : graph. Darst. |
Thesis |
Erlangen, Nürnberg, Univ., Diss., 1995 |
Topic |
|
Subject |
Siliciumbauelement, pn-Übergang, Passivschicht, Kohlenstoff, Amorpher Zustand, Wasserstoff |
Record ID |
949819166 |
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