Title |
Simulation der Ionenimplantation in kristalline Siliziumstrukturen / Walter Bohmayr |
|---|---|
Involved |
Walter Bohmayr (Verfasser) |
Published |
Wien: Österr. Kunst- und Kulturverl. |
Extent |
XIV, 231 S. : graph. Darst. |
Thesis |
Zugl.: Wien, Techn. Univ., Diss., 1996 |
ISBN |
978-3-85437-055-0 |
Country |
|
Topic |
|
Subject |
Silicium, Einkristall, Ionenimplantation, Monte-Carlo-Simulation |
Series |
|
Record ID |
950161853 |
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