Title |
Laserinduziertes Ätzen zur Strukturierung von Halbleiteroberflächen / Hans Weber |
|---|---|
Involved |
Hans Weber (Verfasser) |
Published |
1996 |
Extent |
VIII, 129 S. : Ill., graph. Darst. |
Thesis |
München, Techn. Univ., Diss., 1996 |
Topic |
|
Subject |
Indiumphosphid, Ätzen, Kryptonfluoridlaser, Chlor, Halbleiteroberfläche, Auger-Spektroskopie |
Record ID |
950445169 |
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