Title |
Großvolumige 2,45-GHz-Mikrowellenplasmaquelle nach dem Schlitzantennenprinzip (SLAN) / Frank Werner |
|---|---|
Involved |
Frank Werner (Verfasser) |
Published |
Düsseldorf: VDI-Verl. |
Edition |
Als Ms. gedr. |
Extent |
XIV, 122 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Wuppertal, Univ., Diss. |
ISBN |
978-3-18-322121-9 |
Topic |
|
Subject |
|
Series |
Fortschritt-Berichte VDI. Reihe 21, Elektrotechnik ; Nr. 221 |
Record ID |
950525456 |
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