Title |
Stabstirn-Trennschleifen von einkristallinem Silizium / Matthias Hartmann |
|---|---|
Involved |
Matthias Hartmann (Verfasser) |
Published |
Düsseldorf: VDI-Verl. |
Edition |
Als Ms. gedr. |
Extent |
XIII, 144 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Hannover, Univ., Diss. |
ISBN |
978-3-18-342202-9 |
Topic |
|
Subject |
Silicium, Einkristall, Wafer, Trennschleifen, Prozessüberwachung |
Series |
IFW-Produktionstechnik |
Record ID |
950599557 |
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