Title |
Gate dielectrics and MOS ULSIs : principles, technologies and applications / Takashi Hori |
|---|---|
Involved |
Takashi Hori (Verfasser) |
Published |
Berlin, Heidelberg, New York, Barcelona, Budapest, Hong Kong, London, Milan, Paris, Santa Clara, Singapore, Tokyo: Springer |
Extent |
XIV, 352 S. : graph. Darst. |
ISBN |
978-3-540-63182-8 |
Language |
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Topic |
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Subject |
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Series |
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Other editions |
Erscheint auch als Online-Ausgabe: Gate Dielectrics and MOS ULSIs : Principles, Technologies and Applications |
Further information |
Literaturverz. S. 325 - 341 |
Record ID |
95065986X |
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