Title |
Untersuchung des selektiven Wolfram-CVD-Prozesses zur Viafüllung / Stefan E. Schulz |
|---|---|
Involved |
Stefan E. Schulz (Verfasser) |
Published |
Aachen: Shaker |
Edition |
Als Ms. gedr. |
Extent |
X, 207 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Chemnitz, Zwickau, Techn. Univ., Diss., 1996 |
ISBN |
978-3-8265-2646-6 |
Topic |
|
Subject |
|
Series |
Berichte aus der Halbleitertechnik |
Record ID |
950763551 |
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