Title |
Anwendung der Remote-PECVD-Technologie zur gezielten Verringerung von Defekten in Oxiden auf Siliziumkarbid / Alexander Gölz |
|---|---|
Involved |
Alexander Gölz (Verfasser) |
Published |
Aachen: Shaker |
Edition |
Als Ms. gedr. |
Extent |
147 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Aachen, Techn. Hochsch., Diss., 1997 |
ISBN |
978-3-8265-2794-4 |
Topic |
|
Subject |
|
Series |
Berichte aus der Halbleitertechnik |
Record ID |
951013629 |
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