Title |
Stabilität piezoresistiver Siliziumsensoren / Arne Nakladal |
|---|---|
Involved |
Arne Nakladal (Verfasser) |
Published |
Dresden, München: Dresden Univ. Press |
Extent |
XV, 132 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Dresden, Techn. Univ., Diss., 1997 |
ISBN |
978-3-933168-02-3 |
Topic |
|
Subject |
Siliciumsensor, Halbleiterdrucksensor, Passivschicht, Messgenauigkeit |
Series |
Dresdner Beiträge zur Sensorik ; Bd. 6 |
Record ID |
952746905 |
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