Title |
Wirkdruck-Durchflußmessung und Druckmessung auf der Basis mikromechanischer piezoresistiver Sensoren / von Hermann-Josef Schmidt |
|---|---|
Involved |
Hermann-Josef Schmidt (Verfasser) |
Published |
1997 |
Extent |
146 S. : Ill., graph. Darst. |
Thesis |
Bremen, Univ., Diss., 1996 |
Topic |
|
Subject |
Wirkdruckmesser, Mikromechanik, Balken, Halbleiterdrucksensor, Wheatstone-Brücke |
Record ID |
952763575 |
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