Title |
Numerical simulation of single species dopant diffusion in silicon under extrinsic conditions / J. Lang and W. Merz. Konrad-Zuse-Zentrum für Informationstechnik Berlin, ZIB |
|---|---|
Involved |
Jens Lang (Verfasser) |
Published |
Berlin: ZIB |
Extent |
26 S. : graph. Darst. |
Language |
|
Topic |
|
Series |
Preprint / Konrad-Zuse-Zentrum für Informationstechnik Berlin. SC ; SC 97,47 |
Record ID |
952888459 |
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