Title |
Ultrahochvakuum (UHV)-kompatible Herstellung von Niedertemperaturoxiden für die Mikroelektronik / Alexandra Neubecker |
|---|---|
Involved |
Alexandra Neubecker (Verfasser) |
Published |
1998 |
Extent |
IV, 121 S. : Ill., graph. Darst. |
Thesis |
München, Univ. der Bundeswehr, Diss., 1998 |
Topic |
|
Subject |
|
Record ID |
953341313 |
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