Title |
Zur Kenntnis von Precursoren für die chemische Gasphasenabscheidung von TiN-Dünnschichten / vorgelegt von Ana Maria de Bettencourt Freits Dias |
|---|---|
Involved |
Ana De Bettencourt-Dias (Verfasser) |
Published |
1998 |
Extent |
131 S. : Ill., graph. Darst. |
Thesis |
Köln, Univ., Diss., 1997 |
Topic |
Technische Chemie |
Subject |
Titankomplexe, Amidoverbindungen, Ausgangsmaterial, CVD-Verfahren, Dampfdruck |
Record ID |
953342220 |
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