Title |
Beiträge zum Saphir-Wafer-Direktbonden / Pascal Kopperschmidt |
|---|---|
Involved |
Pascal Kopperschmidt (Verfasser) |
Published |
Düsseldorf: VDI-Verl. |
Edition |
Als Ms. gedr. |
Extent |
VI, 74 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Halle, Univ., Diss., 1997 |
ISBN |
978-3-18-351905-7 |
Topic |
|
Subject |
Saphir, Galliumarsenid, Wafer, Mehrschichtsystem, Bonden |
Series |
Fortschrittberichte VDI. Reihe 5, Grund- und Werkstoffe, Kunststoffe ; Nr. 519 |
Record ID |
953352803 |
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