Title |
AES-, EELS- und AFM-Untersuchungen von sputterinduzierten Effekten an Bornitrid-Oberflächen / Stephan Westermeyr |
|---|---|
Involved |
Stephan Westermeyr (Verfasser) |
Published |
Aachen: Shaker |
Edition |
Als Ms. gedr. |
Extent |
IV, 123 S. : graph. Darst. |
Thesis |
Zugl.: Kaiserslautern, Univ., Diss., 1998 |
ISBN |
978-3-8265-3927-5 |
Topic |
|
Subject |
Bornitrid, Dünne Schicht, Rasterkraftmikroskopie, Auger-Spektroskopie, Elektronen-Energieverlustspektroskopie |
Series |
Berichte aus der Physik |
Record ID |
95409574X |
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