Title |
Flache pn-Übergänge für CMOS-Bauelemente im Sub-0.5μm-Bereich [Sub-0.5 my m-Bereich] / vorgelegt von Mohammad Niazmand |
|---|---|
Involved |
Mohammad Niazmand (Verfasser) |
Published |
1999 |
Edition |
[Mikrofiche-Ausg.] |
Extent |
2 Mikrofiches : 24x |
Thesis |
Berlin, Techn. Univ., Diss., 1999 |
Topic |
|
Subject |
CMOS, MOS-FET, Nanometerbereich, pn-Übergang, Mikroform |
Record ID |
956359981 |
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