Title |
Piezoresistiver Silicium Stress-Mikrosensor zur Spannungsanalyse / vorgelegt von Kay Krupka |
|---|---|
Involved |
Kay Krupka (Verfasser) |
Published |
1999 |
Extent |
129 S. : Ill., graph. Darst. |
Thesis |
Berlin, Techn. Univ., Diss., 1999 |
Topic |
|
Subject |
Mikrosensor, Halbleiterdrucksensor, Siliciumsensor, Wafer, Bonden, Spannungsanalyse |
Record ID |
958050864 |
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