Title |
Entwurf in der Mikrosystemtechnik / Jan Mehner |
|---|---|
Involved |
Jan Mehner (Verfasser) |
Published |
Dresden, München: Dresden Univ. Press |
Extent |
139 S. + 1 Diskette |
Thesis |
Zugl.: Chemnitz, Zwickau, Techn. Univ., Habil.-Schr., 1999 u.d.T.: Mehner, Jan: Methoden und Werkzeuge zum Entwurf von Silizium-Mikrostrukturen |
ISBN |
978-3-931828-47-9 |
Topic |
|
Subject |
|
Series |
Dresdner Beiträge zur Sensorik ; Bd. 9 |
Record ID |
958654344 |
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