Title |
Handbook of advanced plasma processing techniques / R. J. Shul ; S. J. Pearton (ed.) |
|---|---|
Involved |
Randy J. Shul (Herausgeber) |
Published |
Berlin, Heidelberg, New York, Barcelona, Hong Kong, London, Milan, Paris, Singapore, Tokyo: Springer |
Extent |
XVI, 653 S. : Ill., graph. Darst. |
ISBN |
978-3-540-66772-8 |
Language |
|
Topic |
Ingenieurwissenschaften und Maschinenbau |
Subject |
Plasmaätzen |
Series |
Physics and astronomy online library |
Other editions |
Erscheint auch als Online-Ausgabe: Handbook of Advanced Plasma Processing Techniques |
Further information |
Literaturangaben |
Record ID |
958733775 |
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