Title |
Untersuchungen zur Phasenbildung mittels Ionenimplantation im Si-C-N-System / vorgelegt von Frank Link |
|---|---|
Involved |
Frank Link (Verfasser) |
Published |
2000 |
Edition |
[Mikrofiche-Ausg.] |
Extent |
2 Mikrofiches : 24x |
Thesis |
Frankfurt (Main), Univ., Diss., 1999 |
Topic |
|
Subject |
Silicium, Kohlenstoff, Stickstoff, Mehrstoffsystem, Ionenimplantation, Mikroform |
Record ID |
95890751X |
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