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Shike Hu

Mechanical atomic force nanolithography for fabrication of high temperature single electron transistors

Aachen: Shaker, 2001

Title

Mechanical atomic force nanolithography for fabrication of high temperature single electron transistors / Shike Hu

Involved 

Shike Hu (Verfasser)

Published

Aachen: Shaker
2001

Extent

109 S. : Ill., graph. Darst.

Thesis

Zugl.: Aachen, Techn. Hochsch., Diss., 2000

ISBN

978-3-8265-8879-2

Language

Englisch

Topic

Elektrotechnik, Elektronik

Subject

Lithografie (Halbleitertechnologie), Nanostrukturiertes Material, Rasterkraftmikroskopie
Transistor, Einelektronen-Tunneleffekt, Hochtemperaturtechnik, Rasterkraftmikroskopie, Lithografie (Halbleitertechnologie), Nanostruktur

Series

Berichte aus der Elektrotechnik

Record ID

961499656
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