Title |
Flat electromagnetic force-feedback pressure sensor / Bertrand Michel Dutoit |
|---|---|
Involved |
Bertrand Michel Dutoit (Verfasser) |
Published |
Konstanz: Hartung-Gorre |
Edition |
1. Aufl. |
Extent |
VIII, 180 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss., 2001 |
ISBN |
978-3-89649-713-0 |
Language |
|
Topic |
|
Subject |
Differenzdruckmessung, Drucksensor, Elektromechanisches Bauelement, Technische Membran, Nicht rostender Stahl, Planartechnik |
Series |
Series in microsystems ; Vol. 14 |
Record ID |
962392723 |
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