Title |
Synthese epitaktischer Aluminiumnitridschichten mittels ionenstrahlgestützter Laserablation / vorgelegt von Stephan Six |
|---|---|
Involved |
Stephan Six (Verfasser) |
Published |
Berlin: Mensch-und-Buch-Verl. |
Extent |
II, 101 S. : graph. Darst. |
Thesis |
Zugl.: Augsburg, Univ., Diss., 2001 |
ISBN |
978-3-89820-262-6 |
Topic |
|
Subject |
Aluminiumnitrid, Epitaxieschicht, Impulslaserbeschichten, Schichtwachstum, Ionenstrahl |
Record ID |
962832006 |
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