Title |
Silizidbildung in strombeheizten Dünnschichten / vorgelegt von Oliver Schreer |
|---|---|
Involved |
Oliver Schreer (Verfasser) |
Published |
2001 |
Extent |
III, 101 S. : Ill., graph. Darst. |
Thesis |
Erlangen, Nürnberg, Univ., Diss., 2001 |
Topic |
|
Subject |
Silicium, Iridium, Mehrschichtsystem, Elektrischer Strom, Tempern, Silicide |
Record ID |
962893803 |
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