Title |
Photothermische Mikroskopie an Ionenstrahl-strukturierten Halbleitern und Halbleiterbauelementen / vorgelegt von Dirk Dietzel |
|---|---|
Involved |
Dirk Dietzel (Verfasser) |
Published |
2001 |
Thesis |
Bochum, Univ., Diss., 2001 |
Topic |
|
Subject |
Siliciumhalbleiter, Wafer, Ionenimplantation, Reflektometrie, Photothermische Methode, Online-Publikation |
Persistent identifier |
urn:nbn:de:hbz:294-3452 (URN) |
Record ID |
963098683 |
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