Title |
Chemische Nanolithographie mit Elektronenstrahlen an Biphenyl-Monoschichten / [vorgelegt von Volker Stadler] |
|---|---|
Involved |
Volker Stadler (Verfasser) |
Published |
2001 |
Extent |
130 S. : Ill., graph. Darst. |
Thesis |
Heidelberg, Univ., Diss., 2001 |
Language |
|
Topic |
|
Subject |
Monoschicht, Biphenylderivate, Elektronenstrahllithografie, Photoresist, Gold, Substrat (Mikroelektronik) |
Record ID |
963267299 |
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