Title |
Plasma chemical vapor deposition of thin metal oxide films on particles in the riser of a circulating fluidized bed / Josef Karches |
|---|---|
Involved |
Josef Karches (Verfasser) |
Published |
Düsseldorf: VDI-Verl. |
Edition |
Als Ms. gedr. |
Extent |
XIV, 114 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Zürich, Eidgenössische Techn. Hochsch., Diss. |
ISBN |
978-3-18-371903-7 |
Language |
|
Topic |
Technische Chemie |
Subject |
Teilchen, Beschichten, Keramischer Werkstoff, PECVD-Verfahren, Mikrowellenplasma, Zirkulierende Wirbelschicht |
Series |
Fortschrittberichte VDI. Reihe 3, Verfahrenstechnik ; Nr. 719 |
Record ID |
963846663 |
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