Title |
LTCC-kompatible Sensorschichten und deren Applikation in LTCC-Drucksensoren / Uwe Partsch |
|---|---|
Involved |
Uwe Partsch (Verfasser) |
Published |
Templin/Uckermark: Detert |
Edition |
1. Aufl. |
Extent |
III, 163 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Dresden, Techn. Univ., Diss., 2002 |
ISBN |
978-3-934142-11-4 |
Topic |
|
Subject |
|
Series |
Themenreihe: Elektronik-Technologie in Forschung und Praxis ; Bd. 9 |
Record ID |
964239809 |
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