Title |
Plasmaunterstützte Niedertemperaturprozesse für die Siliziumtechnologie : Prozessentwicklung und Defekt-Engineering / Reinhart Job |
|---|---|
Involved |
Reinhart Job (Verfasser) |
Published |
Bochum: Bochumer Univ.-Verl. |
Extent |
XIV, 250 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Hagen, Fernuniv., Habil.-Schr., 2002 |
ISBN |
978-3-934453-87-6 |
Topic |
|
Subject |
|
Series |
|
Record ID |
964446936 |
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