Title |
Umfassende Untersuchungen zur Oxoaluminiumhydridschicht "HAlO" und zu Al-Al2O3-Kompositschichten / von Kathrin Andres |
|---|---|
Involved |
Kathrin Andres (Verfasser) |
Published |
2002 |
Extent |
VI, 178 Bl. : Ill., graph. Darst. |
Thesis |
Saarbrücken, Univ., Diss., 2002 |
Language |
|
Topic |
Technische Chemie |
Subject |
Aluminiumhydridderivate, Oxoverbindungen, Dünne Schicht, Nanostrukturiertes Material, MOCVD-Verfahren |
Record ID |
964819082 |
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