Title |
SnO2 thick film sensors at ultimate limits : performance at low O2 and H2O concentrations ; size reduction by CMOS technology = An den Grenzen von SnO2-Dickschichtsensoren / vorgelegt von Simone Hahn |
|---|---|
Involved |
Simone Hahn (Verfasser) |
Published |
2002 |
Extent |
152 S. : graph. Darst. |
Thesis |
Tübingen, Univ., Diss., 2002 (Nicht für Austausch) |
Language |
|
Topic |
|
Subject |
Metalloxid-Gassensor, Zinndioxid, Dickschichttechnik, CMOS, Sauerstoffkonzentration, Feuchtigkeit |
Other editions |
Erscheint auch als Online-Ausgabe: SnO2 thick film sensors at ultimate limits : performance at low O2 and H2O concentrations ; size reduction by CMOS technology = An den Grenzen von SnO2-Dickschichtsensoren |
Record ID |
965379256 |
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