Title |
Stress and microstructure of sputter deposited thin copper and niobium films / Max-Planck-Institut für Metallforschung Stuttgart ... Vorgelegt von Brando Chidi Okolo |
|---|---|
Involved |
Brando Chidi Okolo (Verfasser) |
Published |
Stuttgart: Max-Planck-Inst. für Metallforschung |
Thesis |
Zugl.: Stuttgart, Univ., Diss., 2003 |
Language |
|
Topic |
|
Subject |
Metallschicht, Sputtern, Mechanische Spannung, Texturanalyse, Röntgenbeugung, Online-Publikation |
Series |
Bericht / Max-Planck-Institut für Metallforschung, Stuttgart ; Nr. 132 |
Persistent identifier |
|
Record ID |
968307272 |
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