Title |
Microfabricated active valves for liquid and gas handling / Philippe Dubois |
|---|---|
Involved |
Philippe Dubois (Verfasser) |
Published |
Allensbach: UFO, Atelier für Gestaltung und Verl. |
Extent |
XX, 156 S. |
Thesis |
Zugl.: Neuchâtel, Univ., Diss., 2003 |
ISBN |
978-3-935511-27-8 |
Language |
|
Country |
|
Topic |
Ingenieurwissenschaften und Maschinenbau |
Subject |
Mikroventil, Mikrosystemtechnik, Tantalnitride, Siliciumnitrid |
Series |
UFO-Dissertation ; Bd. 426 |
Record ID |
968498086 |
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