Title |
Modellierung und Mehrzonentemperaturregelung von Rapid-thermal-processing-(RTP)-Anlagen / Jochen Urban |
|---|---|
Involved |
Jochen Urban (Verfasser) |
Published |
Berlin: WVB, Wiss. Verl. |
Extent |
145 S. : graph. Darst. |
Thesis |
Zugl.: Ilmenau, Techn. Univ., Diss., 2003 |
ISBN |
978-3-936846-35-5 |
Country |
|
Topic |
|
Subject |
Rapid thermal processing, Halogenglühlampe, Wafer, Temperaturregelung, Zustandsregelung, Optimalwertregelung |
Record ID |
968613756 |
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