Title |
Niederdruckplasmen und Mikrostrukturtechnik / Gerhard Franz |
|---|---|
Involved |
Gerhard Franz (Verfasser) |
Published |
Berlin, Heidelberg, New York, NY, Hongkong, London, Mailand, Paris, Tokio: Springer |
Edition |
3. Aufl. |
Extent |
XVII, 543 S. : Ill., graph. Darst. |
ISBN |
978-3-540-40765-2 |
Country |
|
Topic |
|
Subject |
Niederdruckplasma |
Series |
Engineering online library |
Further information |
Literaturverz. S. 497 - 522 |
Record ID |
968775012 |
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