Title |
Chemical mechanical planarization of semiconductor materials / M. R. Oliver (ed.) |
|---|---|
Involved |
Michael R. Oliver (Herausgeber) |
Published |
Berlin, Heidelberg, New York, Hong Kong, London, Milan, Paris, Tokyo: Springer |
Extent |
X, 425 S. : Ill., graph. Darst. |
ISBN |
978-3-540-43181-7 |
Language |
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Topic |
|
Subject |
|
Series |
Physics and astronomy online library |
Other editions |
Erscheint auch als Online-Ausgabe: Chemical-Mechanical Planarization of Semiconductor Materials |
Further information |
Literaturangaben |
Record ID |
970101910 |
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