Title |
Methodology for electrical characterization of MOS devices with alternative gate dielectrics / von Andreas Kerber |
|---|---|
Involved |
Andreas Kerber (Verfasser) |
Published |
2004 |
Extent |
XVI, 123 S. : Ill., graph. Darst. |
Thesis |
Darmstadt, Techn. Univ., Diss., 2004 (Nicht für den Austausch) |
Language |
|
Topic |
|
Subject |
CMOS, Gate-Oxid, Aluminiumoxide, Dielektrizitätszahl, Ladungsträgerbeweglichkeit, Rekombination |
Other editions |
Erscheint auch als Online-Ausgabe: Methodology for electrical characterization of MOS devices with alternative gate dielectrics |
Record ID |
970333374 |
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