Title |
Untersuchungen zum Einsatz des Negativresistmaterials SU-8 in der LIGA-Technik / von Antje Schütz |
|---|---|
Involved |
Antje Schütz (Verfasser) |
Published |
2004 |
Extent |
Online-Ressource |
Thesis |
Berlin, Techn. Univ., Diss., 2004 |
Topic |
|
Subject |
LIGA-Verfahren, Röntgentiefenlithographie, Negativresist, Epoxidharz, Online-Publikation |
Persistent identifier |
|
Record ID |
971598533 |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: