Title |
Lithography-free micro- and nanostructuring based on conventional plasma etching / by Georgi Todorov Georgiev |
|---|---|
Involved |
Georgi Todorov Georgiev (Verfasser) |
Published |
2004 |
Extent |
IV, 95 S. : Ill., graph. Darst. |
Thesis |
Kassel, Univ., Diss., 2004 |
Language |
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Topic |
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Subject |
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DDC notation |
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Other editions |
Erscheint auch als Online-Ausgabe: Lithography-free micro- and nanostructuring based conventional plasma etching |
Record ID |
971956995 |
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