Title |
Profile simulations of gas chopping etching processes : model development and comparison with experiments / by Burkhard E. Volland |
|---|---|
Involved |
Burkhard E. Volland (Verfasser) |
Published |
2004 |
Extent |
Online-Ressource |
Thesis |
Kassel, Univ., Diss., 2004 |
Language |
|
Topic |
|
Subject |
Plasmaätzen, Prozesssimulation, Mikrosystemtechnik, Online-Publikation |
Other editions |
Erscheint auch als Druck-Ausgabe: Profile simulations of gas chopping etching processes : model development and comparison with experiments |
Persistent identifier |
urn:nbn:de:hebis:34-1167 (URN) |
Record ID |
97201022X |
Please note
The beta version does not yet contain all functions and information of the DNB portal catalogue. If you are missing information or want to order a medium, please visit the page in the DNB portal catalogue via the following link: