Title |
Piezoresistive cantilevers with an integrated bimorph actuator / by Tzvetan Ivanov |
|---|---|
Involved |
Tzvetan Ivanov (Verfasser) |
Published |
2004 |
Extent |
II, 133 S. : Ill., graph. Darst. |
Thesis |
Kassel, Univ., Diss., 2004 (Nicht für den Austausch) |
Language |
|
Topic |
|
Subject |
Rasterkraftmikroskopie, Kantilever, Mikroaktor, Piezoelektrischer Drucksensor, Eigenschwingung |
Other editions |
Erscheint auch als Online-Ausgabe: Piezoresistive cantilevers with an integrated bimorph actuator |
Record ID |
972020071 |
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