Title |
Volumenmikromechanische Inertialsensoren / Stefan Beißner |
|---|---|
Involved |
Stefan Beißner (Verfasser) |
Published |
Aachen: Shaker |
Extent |
139 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Braunschweig, Techn. Univ., Diss., 2004 |
ISBN |
978-3-8322-3115-6 |
Country |
|
Topic |
|
Subject |
Beschleunigungssensor, Mikrosystemtechnik, Halbleitertechnologie, Wafer, Silicium, Dreidimensionale Integration |
Series |
|
Other editions |
Erscheint auch als Online-Ausgabe: Volumenmikromechanische Inertialsensoren |
Record ID |
972084053 |
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