Title |
New composite material based on silsesquioxane polymers and nanoporous particles for low-κ [low-kappa] dielectric application / Ruo Qing Su |
|---|---|
Involved |
Ruo Qing Su (Verfasser) |
Published |
2004 |
Extent |
Online-Ressource |
Thesis |
München, Techn. Univ., Diss., 2004 |
Language |
|
Topic |
|
Subject |
Mikroelektronik, Low-k-Dielektrikum, Verbundwerkstoff, Silsesquioxane, Polymeres Netzwerk, Nanopartikel |
Other editions |
Erscheint auch als Druck-Ausgabe: New composite material based on silsesquioxane polymers and nanoporous particles for low-κ [low-kappa] dielectric application |
Persistent identifier |
|
Record ID |
972240519 |
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