Title |
Nanoimprint - Heißprägen als Lithographieverfahren im Mikrometer und Nanometerbereich / von Hubert Schulz |
|---|---|
Involved |
Hubert Schulz (Verfasser) |
Published |
2003 |
Extent |
IX, 104 S. : Ill., graph. Darst. |
Thesis |
Wuppertal, Univ., Diss., 2003 |
Topic |
|
Subject |
|
Record ID |
972397175 |
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