Title |
Numerische Strömungssimulation in 13,56-MHz-Hohlkathoden-Plasmajet- Plasmaquellen für Oberflächenprozesse / Volker Schaffert |
|---|---|
Involved |
Volker Schaffert (Verfasser) |
Published |
2004 |
Extent |
Online-Ressource |
Thesis |
Wuppertal, Univ., Diss., 2004 |
Topic |
|
Subject |
Plasmabrenner, Hohlkathodenentladung, Numerische Strömungssimulation, Online-Publikation |
Persistent identifier |
|
Record ID |
972431403 |
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