Title |
Siliziumkarbidelektronik - technologische und werkstoffwissenschaftliche Untersuchungen zur Metallisierung, Kontaktierung / vorgelegt von Henry Romanus |
|---|---|
Involved |
Henry Romanus (Verfasser) |
Published |
2004 |
Extent |
IV, 179 S. : Ill., graph. Darst. |
Thesis |
Ilmenau, Techn. Univ., Diss., 2004 |
Topic |
|
Subject |
Siliciumcarbid, Ionenimplantation, Ausheilung, Metallisieren, Wolfram, Ohm-Kontakt |
Record ID |
972635017 |
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