Title |
Dynamische Regelung mikroelektromechanischer Systeme (MEMS) mit Hilfe kapazitiver Signalwandlung und Kraftrückkoppelung / Martin Handtmann |
|---|---|
Involved |
Martin Handtmann (Verfasser) |
Published |
2004 |
Extent |
Online-Ressource |
Thesis |
München, Techn. Univ., Diss., 2004 |
Topic |
|
Subject |
MEMS, Drehratensensor, Kapazitiver Sensor, Regelungssystem, Coriolis-Kraft, Sigma-Delta-Wandler |
Persistent identifier |
|
Record ID |
973065613 |
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