Title |
Zur Theorie auf selbsterregter Elektronenresonanz basierender Diagnostikmethoden für kapazitiv gekoppelte Niedertemperaturplasmen / Thomas Mussenbrock |
|---|---|
Involved |
Thomas Mussenbrock (Verfasser) |
Published |
Berlin, Bochum, Dülmen, London, Paris: Europ. Univ.-Verl. |
Extent |
IV, 129 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Bochum, Univ., Diss., 2004 |
ISBN |
978-3-86515-026-4 |
Country |
|
Topic |
|
Subject |
Hochfrequenzplasma, Niedrigtemperatur, Plasmadiagnostik, SEERS |
Series |
Plasmatechnik ; Bd. 1 |
Record ID |
973905913 |
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