Title |
Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon / vorgelegt von Michael Gensch |
|---|---|
Involved |
Michael Gensch (Verfasser) |
Published |
Berlin: Mensch-und-Buch-Verl. |
Extent |
101 S. : Ill., graph. Darst. |
Thesis |
Zugl.: Berlin, Techn. Univ., Diss., 2004 |
ISBN |
978-3-89820-906-9 |
Language |
|
Country |
|
Topic |
|
Subject |
Silicium, Halbleitergrenzfläche, Organische Verbindungen, Dünne Schicht, Ellipsometrie |
Record ID |
976002981 |
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